EDX Specifications

Leica Sigma VP

TypeOxford INCA Energy 350
Detector XMax 80
Elementsfrom B to U

Phenom XL EDS

Detector type   Silicion Drift Detector SDD
Thermoelectrically colled ( LNl free)
Detrctor active areas25 mm2
X-Ray windowUltra thin Silicon Nitride Si3N4 allowing decttection of elements from B to Am
Energy resolutionMn Ka <= 137 eV Processing capabilities Multichannel analyser with 2048 channels at 10eV/ch
Max input count rate 300000 cps
Hardware integrationFully embeded
SoftwareIntegrated in Phenom ProSuite Integrated column and stage control Auto-peak ID Iteratieve strip peak convolution Confidence of analysis indicator Export features CSV, JPG, tiFF, ELID, EMSA

EDX application

For the  following example of EDX application a laser structured image has been chosen. The dark areas are shown to be oxidized. 

Small section of the image that has been engraved on the stainless steel sample by laser structuring.
Overview image of the structure stainless steel area. In this particular case; the dark field also appear darker by eye inspection.
BSD image of structured are the EDX mapping to the right is done in the selected rectangle
The EDX mapping of oxygen clearly shows the presence of oxides in the darker sample area.

Analytical capabilities and application of EDX with one of our SEMs

  • qualitative and quantitative analysis from boron to uranium
  • qualitative and quantitative linescans and mappings
  • phase mapping

More information on SEM and EDX?

A complimentary technique for determination of elementary composition and quantitative depth profiling is GD-OES.